Displacement Sensors

A line of capacitive displacement sensing systems with sub-nanometer resolution for static and dynamic measurements is available. The systems consist of a standard electronic module and a pair of sensors. By exchanging the sensors, the measurement range can be varied from 15 to 500 microns, without recalibrating the electronics. The resolution of the 50-micron sensor is 0.1 nm/Hz. The linearization circuitry on the electronic module improves measuring linearity up to better than 0.01%. At the same time it allows for cable lengths up to five meters between electronics and sensors. With a bandwidth up to 10 kHz the sensors are suited for dynamic measurements. Sensors and electronics are compatible with the company's line of piezoelectric micropositioning systems.

Physik Instrumente, 76337 Waldbronn, Germany. Phone: 490 7243 604-100; Fax: 49 7243 604-145.